The problem is that the Create file action only supports text-based file creation (txt, csv, etc.). You'll need to start with a blank/empty .xlsx file, create a copy of that, populate the name dynamically, and save the file.
Then you'd need to use the Excel connector to add rows to the table in the dynamically created .xlsx file. The problem with this will be reliability, because the Excel connector has many Known issues and limitations.
With that said, the Plumsail Documents connector can cut down a number of these steps. See their How to create Excel XLSX document from template in Microsoft Flow, Azure Logic Apps and PowerApps documentation for more info.
If you could provide an expanded screenshot of your Flow and steps, and of any detailed error messages you're receiving we could likely better assist you.
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