Remove the "Create file 3" action and re-add it.
If it still doesn't work, try to test these actions with a new flow with different files, without "Apply to each" to find the root cause.
Try with a different file name. Do you get the same error every single time?
The error message indicates that there is an issue with the create file action in SP, not the delete file action.
Try deleting the files from OD.
I would suggest adding a delay action before the delete file action.
What was the output? Did you receive any error?
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